Optical MEMS

SEM image of pop-up mirrors with flexible hinges

The MSEL staff has developed innovative approaches for optical MEMS sensing devices and systems.  

Optical MEMS are being used to meet stringent size, low-power consumption, and high-precision requirements. Our optical MEMS work includes

• Direct optical readout of physical sensors
• MEMS uncooled IR focal plane array with optical readout

• IR (THz) imaging array

• MEMS mirror arrays for use in optical spectrometric detection

• Retro-reflective optical data communications
• Ultra-low power tagging tracking locating and low-speed data communications
• Compact short- and long-range versions
• Glass corner cube retroreflector
• Very low power (uW) operation

• Optical grating sensor
• Optical readout accelerometer for high sensitivity and high EMI rejection

Selected publications