Amorphous silicon thin film transistor image sensors

Abstract

Amorphous silicon thin film transistors are the underlying technology for flat panel displays and medical x-ray imaging. We describe some developments of the TFT technology for high performance detectors and flexible image sensors that have occurred in recent years. X-ray detectors with high gain now make it possible to detect the ionization tracks of individual x-rays and provide a new approach to neutron imaging. Development of the amorphous silicon deposition process makes it possible to fabricate image sensor arrays on plastic substrates.